CONTACTS
ADD ：Jinfeng Town, Chongqing of China
TEL ：0086-138 9636 7407
MAIL：sales@sio2.company
WEB ：www.sio2.company
TEL ：0086-138 9636 7407
MAIL：sales@sio2.company
WEB ：www.sio2.company
Evaporation Boat
Evaporation Boat is a core component for resistance thermal evaporation in physical vapor deposition (PVD). It serves dual functions as a material carrier and resistive heater. Under high vacuum, it converts electrical energy into Joule heat to melt and vaporize materials such as aluminum, silver, copper, and gold, which then condense on substrates to form functional thin films. It is mainly categorized into refractory metal boats (tungsten, molybdenum, tantalum) and conductive ceramic composite boats (TiB₂‑BN, TiB₂‑BN‑AlN). Ideal for large‑scale applications including roll‑to‑roll (R2R) metallization, semiconductor electrode deposition, and optical coating, it features uniform heating, stable evaporation, and strong compatibility, acting as a critical consumable in packaging, electronics, and optoelectronics industries.
Core Features
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High Temperature Resistance and Low Vapor Pressure
Refractory metal boats boast ultra‑high melting points (tungsten 3422°C, molybdenum 2623°C, tantalum 3017°C), while ceramic composite boats operate stably at 1500~1650°C. Both types have extremely low vapor pressure, preventing self‑vaporization from contaminating the deposited films and ensuring film purity.
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Efficient Energy Conversion and Thermal Uniformity
High resistive heating efficiency enables rapid conversion of electrical energy to heat. Ceramic boats achieve precise temperature control by adjusting resistivity via formula optimization; metal boats ensure uniform heating through excellent thermal conductivity, reducing evaporation splashing and improving film thickness consistency.
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Chemical Stability and Compatibility
Tungsten/molybdenum boats are suitable for evaporating inert metals like gold and chromium; tantalum boats offer strong corrosion resistance for applications involving reactive materials; ceramic boats (e.g., TiB₂‑BN) exhibit good wettability and non‑reactivity with common materials such as aluminum. Custom ceramic‑lined coatings are available for special corrosive materials.
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Structural and Specification Flexibility
Structural types include stamped, folded, and welded boats. Customizable dimensions (length 50~1000mm, width 10~50mm, thickness 3~10mm) with conductive clamps at both ends fit electrode interfaces of various vacuum coaters, supporting single‑boat or multi‑boat parallel operation.
Main Types and Application Scenarios
| Type | Material | Core Advantages | Suitable Evaporants | Typical Applications |
|---|---|---|---|---|
| Tungsten Boat | 99.95% high‑purity tungsten | Highest melting point, excellent high‑temperature stability | Gold, chromium, nickel | Semiconductor electrodes, optical high‑reflection films |
| Molybdenum Boat | 99.95% high‑purity molybdenum | Oxidation resistance, good thermal conductivity, moderate cost | Silver, aluminum, oxides | Display electrodes, decorative coatings |
| Tantalum Boat | 99.9% high‑purity tantalum | Strong corrosion resistance, compatibility with reactive materials | Titanium, zirconium, corrosive substances | Special functional films, aerospace component coatings |
| TiB₂‑BN Ceramic Boat | Titanium diboride + boron nitride | Good wettability, high evaporation efficiency | Aluminum, copper | Packaging metallization, capacitor electrode coating |
| TiB₂‑BN‑AlN Ceramic Boat | Titanium diboride + boron nitride + aluminum nitride | Precise temperature control, long service life | Aluminum, silver, alloys | High‑speed R2R metallization, flexible electronics |
Technical Parameters (Typical Values)
| Item | Tungsten Boat | Molybdenum Boat | TiB₂‑BN Ceramic Boat | Test Method |
|---|---|---|---|---|
| Purity | ≥99.95% | ≥99.95% | TiB₂≥60%, BN≥35% | GDMS/Chemical Analysis |
| Operating Temperature | ≤2800℃ | ≤2200℃ | ≤1650℃ | Infrared Thermometry |
| Resistivity (25℃) | 5.6×10⁻⁸ Ω·m | 5.3×10⁻⁸ Ω·m | 1~10 Ω·cm | Four‑Probe Method |
| Density | 19.3 g/cm³ | 10.2 g/cm³ | 3.8~4.2 g/cm³ | Archimedes Method |
| Recommended Power Density | 8~12 W/cm² | 6~10 W/cm² | 4~8 W/cm² | Industry Empirical Data |
| Typical Service Life | 50~100 Cycles | 80~150 Cycles | 200~500 Cycles | Aluminum Evaporation Condition |
Manufacturing Process
- Refractory Metal Boats: High‑purity tungsten/molybdenum/tantalum sheets are formed via precision stamping, folding, or welding. Vacuum annealing relieves internal stress, and surface polishing removes impurities to ensure uniform conductivity and heating.
- Ceramic Composite Boats: TiB₂, BN, and other powders are mixed in proportion, shaped by isostatic pressing with binders, then densified via vacuum sintering at 1800~2000℃. Subsequent cutting and grinding process the boat to target dimensions, with conductive clamp positions reserved at both ends.
- Quality Inspection & Packaging: Dimensional accuracy, resistivity, and density are tested. Qualified products are vacuum‑sealed to prevent oxidation and moisture damage, with a 12‑month shelf life.
Usage and Maintenance Guidelines
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Usage Tips
- Clean electrodes and clamps before installation to ensure good contact and avoid local arcing; power on only when vacuum reaches ≥5×10⁻³ Pa.
- Adopt constant current/voltage power supply. The recommended power density is 6~12 W/cm² for tungsten/molybdenum boats and 4~8 W/cm² for ceramic boats to prevent ablation from overloading.
- Preheat for 10~15 minutes before evaporation. For materials like aluminum, balance wire‑feeding speed and boat surface wetting to minimize splashing.
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Maintenance & Storage
- Remove residual material after each use to avoid uneven heating in subsequent runs; replace immediately if cracks or deformation occur.
- Store in a vacuum‑sealed package in a dry environment (temperature 5~30℃, relative humidity ≤40%), away from acids, alkalis, and corrosive gases.
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